JPH0335511Y2 - - Google Patents

Info

Publication number
JPH0335511Y2
JPH0335511Y2 JP1987169697U JP16969787U JPH0335511Y2 JP H0335511 Y2 JPH0335511 Y2 JP H0335511Y2 JP 1987169697 U JP1987169697 U JP 1987169697U JP 16969787 U JP16969787 U JP 16969787U JP H0335511 Y2 JPH0335511 Y2 JP H0335511Y2
Authority
JP
Japan
Prior art keywords
workpiece
laser beam
frame
laser
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987169697U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0172993U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987169697U priority Critical patent/JPH0335511Y2/ja
Publication of JPH0172993U publication Critical patent/JPH0172993U/ja
Application granted granted Critical
Publication of JPH0335511Y2 publication Critical patent/JPH0335511Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
JP1987169697U 1987-11-06 1987-11-06 Expired JPH0335511Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987169697U JPH0335511Y2 (en]) 1987-11-06 1987-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987169697U JPH0335511Y2 (en]) 1987-11-06 1987-11-06

Publications (2)

Publication Number Publication Date
JPH0172993U JPH0172993U (en]) 1989-05-17
JPH0335511Y2 true JPH0335511Y2 (en]) 1991-07-26

Family

ID=31459987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987169697U Expired JPH0335511Y2 (en]) 1987-11-06 1987-11-06

Country Status (1)

Country Link
JP (1) JPH0335511Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022190924A1 (ja) * 2021-03-12 2022-09-15 東京エレクトロン株式会社 基板処理装置、基板処理システム及び基板処理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022190924A1 (ja) * 2021-03-12 2022-09-15 東京エレクトロン株式会社 基板処理装置、基板処理システム及び基板処理方法
JPWO2022190924A1 (en]) * 2021-03-12 2022-09-15

Also Published As

Publication number Publication date
JPH0172993U (en]) 1989-05-17

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